Enhanced analytical model for micromachined microphones
نویسندگان
چکیده
منابع مشابه
An enhanced analytical model for residual stress prediction in machining
The predictions of residual stresses are most critical on the machined aerospace components for the safety of the aircraft. In this paper, an enhanced analytic elasto-plastic model is presented using the superposition of thermal and mechanical stresses on the workpiece, followed by a relaxation procedure. Theoretical residual stress predictions are verified experimentally with X-ray diffraction...
متن کاملMicromachined Microphones with Diffraction-based Optical Interferometric Readout and Electrostatic Actuation
Micromachined microphones that use a diffraction-based optical method for integrated interferometric detection of diaphragm displacement are described. With optoelectronics integration, this approach yields highly sensitive microphones in mm-cube volumes. Furthermore, the electrical port of the device, which is freed by optical detection, is used for electrostatic actuation of the microphone di...
متن کاملImproved Modeling and Design of Microphones Using Radio Frequency Detection with Capacitive Micromachined Ultrasonic Transducers
Broadband acoustic sensing, over several decades of frequency, has traditionally been difficult to achieve. An alternative approach to conventional condenser microphones is to use capacitive micromachined ultrasonic transducer (CMUT) membranes with a sensitive radio frequency (RF) detection method. Since the resonant frequency of a typical CMUT membrane is several megahertz, the membrane respon...
متن کاملDistributed-Mass Micromachined Gyroscopes for Enhanced Mode-Decoupling
A novel micromachined z-axis gyroscope with multidirectional drive-mode is presented. The design concept aims to relax mode-matching requirement, eliminate effects of directional residual stresses, and completely decouple the drive and sense modes. The proposed approach is based on de ning multiple drive-mode oscillators, distributed symmetrically around the center of a supporting frame. Quadra...
متن کاملIntegrated Analytical Model for Relief Logistics in Uncertain Conditions
The life of many people in the world is under the danger because of the accidents and unpredicted diseases, which require relief. Since, most of such cases occur in unpredictable condition, for an appropriate planning, the uncertain conditions should be investigated. Consequently, this paper investigates the integrated and multi-step process of locating, assigning and routing the air and la...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2006
ISSN: 1742-6588,1742-6596
DOI: 10.1088/1742-6596/34/1/140